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排序方式: 共有10000条查询结果,搜索用时 421 毫秒
41.
K. Venkatakrishnan B.K.A. Ngoi P. Stanley L.E.N. Lim B. Tan N.R. Sivakumar 《Applied Physics A: Materials Science & Processing》2002,75(4):493-496
Photomasks are the backbone of microfabrication industries. Currently they are fabricated by a lithographic process, which
is very expensive and time consuming since it is a multi-step process. These issues can be addressed by fabricating photomasks
by direct femtosecond laser writing, which is a single-step process and comparatively cheaper and faster than lithography.
In this paper we discuss our investigations on the effect of two types of laser writing techniques, namely front- and rear-side
laser writing, with regard to the feature size and the edge quality of a feature. It is proved conclusively that for the patterning
of masks, front-side laser writing is a better technique than rear-side laser writing with regard to smaller feature size
and better edge quality. Moreover the energy required for front-side laser writing is considerably lower than that for rear-side
laser writing.
Received: 22 May 2001 / Accepted: 14 September 2001 / Published online: 17 October 2001 相似文献
42.
43.
LI Zi-jian LIU Ning LIU Zhi-qiang LIU Shu-ying HAN Qi-de ZHANG You-yi . Institute of Vascular Medicine Peking University Third Hospital Key Laboratory of Molecular Cardiovascular Sciences Ministry of Education Beijing P. R. China . Changchun Institute of Applied Chemistry Chinese Academy of Sciences Changchun P. R. China 《高等学校化学研究》2006,22(3):319-323
Introduction Adrenoceptors(ARs),membersofthesuperfami lyofG proteincoupledreceptors,arethemostimpor tantreceptorsinvolvedincardiacregulation[1].ARsin cardiacmuscleincludebothαARsandβARssub types,whileinmostmammalianheart,βARsarethe predominantsubtypes.… 相似文献
44.
The impact of fabrication errors on a planar waveguide demultiplexer is analyzed based on an analytical method. The explicit
expression of the transfer function taking into account phase and amplitude errors is presented in order to analyze the loss
and crosstalk of the demultiplexer caused by fabrication errors. A basic requirement for the demultiplexer with a certain
crosstalk criterion can be easily obtained. Using an etched diffraction grating demultiplexer as an example, it is shown that
the analytical results have a good agreement with results from a numerical method. 相似文献
45.
The new phenylpropanoid diglycoside ligusinenoside A ( 1 ), and the two new 8,4′‐oxyneolignan(‘8‐O‐4′‐neolignan’) diglycosides ligusinenosides B ( 2 ) and C ( 3 ), together with nine known compounds, were isolated from the rhizomes of Ligusticum sinensis Oliv. The structures of 1 – 3 were elucidated on the basis of spectroscopic analyses. 相似文献
46.
47.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
48.
A Multi-component Matrix Loop Algebra and Its Application 总被引:3,自引:0,他引:3
DONG Huan-He ZHANG Ning 《理论物理通讯》2005,44(6):997-1001
A set of multi-component matrix Lie algebra is constructed. It follows that a type of new loop algebra A^- M-1 is presented. An isospectral problem is established. Integrable multi-component hierarchy is obtained by Tu pattern, which possesses tri-Hamiltonian structures. Furthermore, it can be reduced to the well-known AKNS hierarchy and BPT hierarchy. Therefore, the major result of this paper can be regarded as a unified expression integrable model of the AKNS hierarchy and the BPT hierarchy. 相似文献
49.
It is well known that topology and dynamics are two major aspects to determine the function of a network. We study one of the dynamic properties of a network: trajectory convergence, i.e. how a system converges to its steady state. Using numerical and analytical methods, we show that in a logical-like dynamical model, the occurrence of convergent trajectory in a network depends mainly on the type of the fixed point and the ratio between activation and inhibition links. We analytically proof that this property is induced by the competition between two types of state transition structures in phase space: tree-like transition structure and star-like transition structure. We show that the biological networks, such as the cell cycle network in budding yeast, prefers the tree-like transition structures and suggest that this type of convergence trajectories may be universal. 相似文献
50.
Chirped fiber grating was used in dispersion compensator. We tried to use the same phase mask to write fiber grating of different wavelength with two methods to reduce the price of the fiber grating. 相似文献